Assessing the Environmental Impact of Atomic Layer Deposition (ALD) Processes and Pathways to Lower It

Due to concerns on resources depletion, climate change, and overall pollution, the quest toward more sustainable processes is becoming crucial. Atomic layer deposition (ALD) a versatile technology, allowing for precise coating of challenging substrates with nanometer control over thickness. its unique ability nanoengineer interfaces surfaces, ALD widely used in many applications. Although technique offers potential tackle environmental challenges, particular, considerations regarding sustainability renewable energy devices urge greater efficiency lower carbon footprint. Indeed, process itself has currently consequential impact environment, which should ideally be reduced as implemented wider range products This paper reviews studies carried out assessment summarizes main results reported literature. Next, principles green chemistry are discussed, considering specificities process. work also suggests future pathways reduce impact; optimization reactor processing parameters, use high throughput such spatial (SALD), chemical design greener precursors proposed efficient routes improve sustainability.